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Rui Chen Suzhou Ruichen precision ceramic Co.,Ltd.
Address：No.68, Qinggang Road, Dongfang Avenue, Luzhi Town, Wuzhong Dist., Suzhou,
Tel：+86 512 6504-4389
Fax： +86 512 6504-4289
Mail： ruichen.ceramic@gmail.com |
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Ceramic Vacuum Chuck |
Position:Home > Product > Ceramic Vacuum Chuck |
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Ceramic Vacuum Chuck
The role of the wafer clamping system includes not only drive the wafer in the processing operation, but also to the processing required for the work load on the wafer, and to ensure that wafer warpage does not occur under the action of the processing load.
Therefore, the performance of wafer clamping system to improve the quality of the final wafer. Currently the most widely used method is the use of vacuum adsorption of the workpiece, the 『 Vacuum Chuck 』with high efficiency, non-polluting, high positioning accuracy of fine features in the wafer clamping system.
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